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Product Name: SpecEl Ellipsometer System
Product Description
he SpecEl-2000-VIS Ellipsometer measures polarized light reflected from the surface of a substrate to determine the thickness and refractive index of the material as a function of wavelength. The SpecEl is controlled via a PC. Measure refractive index, absorbance and thickness with the touch of a button.
All-in-one Accurate System
The SpecEl houses an integrated light source, a spectrometer and two polarizers fixed to 70°. It also includes a PC with a 32-bit Windows operating system. The SpecEl can detect a single layer as thin as 0.1 nm and up to 5 µm thick. In addition, it can provide refractive indices to 0.005°.
The SpecEl is available for Call for Price .
SpecEl Software and Recipe Files
In SpecEl Software, you can configure and save experiment method files for one-step analysis. after creating a
recipe, you can select the recipe to execute the experiment.
This screen shot from the SpecEl Software demonstrates the Psi and Delta values you can calculate for thickness, refractive index and absorbance.
Specifications
| Wavelength
range: |
380-780 nm
(standard) or 450-900 nm (optional) |
| Optical
resolution: |
4.0 nm FWHM |
| Accuracy: |
0.1 nm
thickness; 0.005% refractive index |
| Angle of
incidence: |
70° |
| Film thickness: |
1-5000 nm for
single transparent film |
| Spot size: |
2 mm x 4 mm
(standard) or 200 µm x 400 µm (optional) |
| Sampling time: |
3-15 seconds
(minimum) |
| Kinetic logging: |
3 seconds |
| Mechanical
tolerance (height): |
+/- 1.5 mm,
angle +/- 1.0° |
| Number of
layers: |
Up to 32 layers |
| Reference: |
Not applicable |
Company Details
Ocean Optics is a leading supplier of solutions for optical sensing – fundamental methods of measuring and interpreting the interaction of light with matter. We enable diverse applications in medical and biological research, environmental... more
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