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Product Name: NanoCalc Thin Film Reflectometry System
Product Description
The optical properties of thin films arise from reflection and interference. The NanoCalc Thin Film Reflectometry System allows you to analyze the thickness of optical layers from 10 nm to ~250 µm.. You can observe a single thickness with a resolution of 0.1 nm. Depending on your software choice, you can analyze single-layer or multilayer films in less than one second and can measure the thickness and removal rates of semiconductor process films or anti-scratch coatings, hard coatings and anti-reflection coatings.
Features
Analyze single- or multi-layer films
Resolution to 0.1 nm
Ideal for in situ, on-line thickness measurements
Theory of Operation
The two most common ways to measure thin film characteristics are spectral reflectance/transmission and ellipsometry. NanoCalc utilizes the reflectance method and measures the amount of light reflected from a thin film over a range of wavelengths, with the incident light normal to the sample surface.
Search by n and k
As many as three layers can be specified in a film stack. The various films and substrate materials can be metallic, dielectric, amorphous or crystalline semiconductors. The NanoCalc Software includes a large library of n and k values for the most common materials. You can edit and add to this library. Also, you can define material types by equation or dispersion formulas.
Applications
NanoCalc Thin Film Reflectometry Systems are ideal for in situ, on-line thickness measurements and removal rate applications, and can be used to measure the thickness of oxides, SiNx, photoresist and other semiconductor process films. NanoCalc Systems measure anti-reflection coatings, anti-scratch coatings and rough layers on substrates such as steel, aluminum, brass, copper, ceramics and plastics.
NanoCalc Systems
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NC-UV-VIS-NIR
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Wavelength:
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250-1100 nm
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Thickness:
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10 nm-70 µm
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Light source:
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Deuterium and Tungsten Halogen
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Price:
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$18399
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NC-UV-VIS
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Wavelength:
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250-850 nm
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Thickness:
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10 nm-20 µm
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Light source:
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Deuterium and Tungsten Halogen
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Price:
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$14151
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NC-VIS-NIR
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Wavelength:
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400-1100 nm
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Thickness:
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20 nm-100 µm (optional 1 µm-250 µm)
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Light source:
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Tungsten Halogen
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Price:
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$16952
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NC-VIS
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Wavelength:
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400-850 nm
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Thickness:
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50 nm-20 µm
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Light source:
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Tungsten Halogen
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Price:
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$12781
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NC-NIR
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Wavelength:
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650-1100 nm
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Thickness:
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70 nm-70 µm
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Light source:
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Tungsten Halogen
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Price:
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$12781
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NC-NIR-HR
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Wavelength:
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650-1100 nm
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Thickness:
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70 nm-70 µm
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Light source:
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Tungsten Halogen
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Price:
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$18087
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NC-512-NIR
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Wavelength:
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900-1700 nm
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Thickness:
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50 nm-200 µm
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Light source:
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High-power Tungsten Halogen
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Price:
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$42472
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NanoCalc Specifications
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Angle of incidence:
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90°
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Number of layers:
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3 or fewer
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Reference measurement needed:
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Yes (bare substrate)
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Transparent materials:
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Yes
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Transmission mode:
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Yes
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Rough materials:
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Yes
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Measurement speed:
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100 milliseconds to 1 second
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On-line possibilities:
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Yes
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Mechanical tolerance (height):
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With new reference or collimation (74-UV)
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Mechanical tolerance (angle):
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Yes, with new reference
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Microspot option:
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Yes, with microscope
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Vision option:
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Yes, with microscope
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Mapping option:
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6 and 12 XYZ mapping tables
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Vacuum possibilities:
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Yes
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Company Details
Ocean Optics is a leading supplier of solutions for optical sensing – fundamental methods of measuring and interpreting the interaction of light with matter. We enable diverse applications in medical and biological research, environmental... more
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