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Product Name: Spindles ABS2000
Product Description
Aerotech’s ABS series direct-drive air-bearing spindles were designed to provide superior angular positioning and velocity control for applications including disk drive testing, imaging applications, and precision wafer inspection.
Superior Mechanical Design
The ABS2000 is balanced to ISO 1940 G 0.4 tolerances. This unique design includes externally accessible balancing screws that can be adjusted with final payload in place. The design also uses labyrinth-type sealing to minimize particle migration from the spindle, resulting in certification for Class 1 clean-room operation. An integral rotary union is provided for a vacuum supply.
Low Loss, Non-Influencing Direct-Drive Motor
Aerotech’s custom designed, low-loss motor produces >0.25 N-m (38 oz-in) of continuous torque, with negligible motor losses, eliminating the need for cooling fins and/or external cooling. The non-influencing motor design minimizes parasitic forces in the motor, providing the exceptionally high level of error motion performance. These motors have all the advantages of a brushless direct-drive motor — no brushes to wear, and high acceleration
and high speeds. With its low inherent inertia and high torque output, the ABS is capable of extremely high speeds and accelerations.
Accurate Positioning
With a velocity ripple of <0.1%, an asynchronous error motion <20 nm, and total error motion <100 nm, the Aerotech spindle offers superior performance for high accuracy applications. The high performance motor and rotary encoder are directly coupled to a common shaft. When used with the Aerotech A3200 controller and Npaq® drive rack the spindle resolution can be as high as 0.05 arc sec with no speed trade-offs. This makes the spindle ideal for applications requiring both spindle operation and stage operation.
Flexible Configurations
Options include mechanical or vacuum chuck configurations, grounding ball, and optics mounting. Alternate higher torque motors are available. Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated motion package.
Company Details
Aerotech: Dedicated to the Science of Motion in order to benefit our
customers.
Since 1970, Aerotech has designed and manufactured the highest performance
motion control and positioning systems for our customers in industry,
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Air Bearings ABL1000, Air Bearings ABL1500, Air Bearings ABL2000, Air Bearings ABL8000, Air Bearings ABL9000, Air Bearings ABL9000, Air Bearings AHL9000, Amplifiers Ndrive, ANT-25LA Linear Actuator, Drive Racks DR300, Drive Racks DR500, Drive Racks DR600, Drive Racks Npaq, Gantry Systems ABG10000, Gantry Systems AGS1000, Gantry Systems AGS10000, Gantry Systems AGS20000, Goniometer, Lift Stages ANT-4V, Lift Stages AVL-125, Lift Stages AVL-125, Lift Stages AVL1000, Lift Stages AVS100/AVSI100, Lift Stages AVS105, Lift Stages WaferMax Z, Linear Motors BLM, Linear Motors BLMC, Linear Motors BLMF, Linear Motors BLMFS5, Linear Motors BLMH, Linear Motors BLMUC, Linear Motors BLMX, Linear Stages ALS1000, Linear Stages ALS130 Series, Linear Stages ALS135, Linear Stages ALS20000, Linear Stages ALS20000, Linear Stages ALS25000, Linear Stages ALS3600, Linear Stages ALS5000, Linear Stages ALS5000WB, Linear Stages ANT-LX, Linear Stages MaskAlign 100, Manual Positioners Linear Positioner, Manual Positioners Precision Tilt Tables, Manual Positioners Rotary Stages, Motion Controllers Unidex 500, Motion Controllers Unidex 511, Ndrive HL, Optical Mounts AMG, Optical Mounts AMG LP, Optical Mounts AOM105, Optical Mounts AOM105, Optical Mounts AOM110, Optical Mounts AOM130, Optical Mounts AOM130M, Optical Mounts AOM300, Optical Mounts AOM360, Optical Mounts AOM360, Photonic Positioners ANT-25L/-50L, Rotary Motors 1000, Rotary Motors BM, Rotary Motors Frameless S, Rotary Motors SM Series Stepper Motor, Rotary Motors SM Series Stepper Motor, Rotary Stages ABRT, Rotary Stages ABRS, Rotary Stages ACS, Rotary Stages ACS, Rotary Stages ACS LP, Rotary Stages ADRS, Rotary Stages ADRT, Rotary Stages ALAR, Rotary Stages ASR1000, Rotary Stages ASR1200, Spindles ASR2000 |
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Rotary Motors Frameless S, Rotary Stages ABRT, Rotary Stages ABRS, Spindles ASR2000 |
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