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Thin Film Reference Wafer
Product Description
When measuring the thickness of substrates such as silicon wafers or optical
layers, consider our Silicon-Silicon Dioxide (Si-SiO2) Reference Wafer.
Available for $689, the REFERENCE is a 9.8-cm diameter, 6-step wafer that has a
calibrated thickness range of 0-350 nm, and is ideal for use as a reference
standard when measuring the thickness of thin, transparent layers on different
substrates.
The Reference Wafer consists of a thin wafer of silicon dioxide on silicon, with
each transparent step numbered and etched on the wafer surface. A calibration
data sheet -- the wafer is calibrated using an ellipsometer -- includes for each
step information such as the X and Y positions, ψ, δ, period (in mm) and
thickness (in mm).
Company Details
Ocean Optics is a leading supplier of solutions for optical sensing – fundamental methods of measuring and interpreting the interaction of light with matter. We enable diverse applications in medical and biological research, environmental... more
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