|
Product Name: P-620.2 – P-628.2
Product Description
P-620.2CD – P-628.2CD PIHera systems are XY piezo-nanopositioning stages featuring travel ranges from 60 to 1000 µm. Despite the increased travel ranges, the units are extremely compact and provide sub-nanometer resolution. The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy (typically less than 5 µrad pitch/yaw over the full travel range).
Superior Accuracy Through Direct-Motion Metrology with Capacitive Sensors
The capacitive-sensor-equipped versions provide motion linearity to 0.02% with effective resolution in the sub-nanometer range. PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.
Unlike conventional sensors, capacitive sensors measure the actual distance between the fixed frame and the moving part of the stage. They detect errors contributed by all components in the drive train—from the actuator through the flexures to the platform. This results in higher motion linearity, long-term stability, phase fidelity, and—because external disturbances are seen by the sensor immediately—a stiffer, faster-responding servo-loop.
Nanometer Precision in Milliseconds
One of the advantages of PIHera® stages over motor-driven positioning stages is the rapid response input changes and fast and precise settling behavior. Furthermore our new digital control electronics with DDL (Dynamic Digital Linearization) can be used to increase linearity and effective bandwidth in scanning applications by up to 1000-fold.
Working Principle / Reliability
PIHera® stages are equipped with the award winning PICMA® piezo drives, integrated into a sophisticated flexure guiding system. The flexures are FEA-modeled for zero-friction and exceptional guiding precision. The ceramic-encapsulated PICMA® drives are more robust than conventional piezo actuators, featuring superior lifetime and performance in both dynamic and static applications. Because guidance, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability.
Application Examples
(Dynamic) interferometry
Microscopy
Nanopositioning
Biotechnology
Quality assurance
Semiconductor technology
Company Details
Where nanopositioning technology and motion control systems of the highest accuracy level are concerned, PI has been a leading supplier worldwide for many years.
Over 30 Years Experience
When PI introduced piezoelectric... more
| More Products of this Company: |
M-714, NEXLINE® High-Load Piezo Nanopositioning Drive N-214 · N-215, P-280, P-281 · P-282, P-287, P-290 (Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator), P-363, P-517 · P-527, P-518 · P-528 · P-558, P-541.2CD · P-542.2CD, P-541.ZSL, P-541.ZSL, P-561 · P-562 · P-563, P-587, P-601 (PiezoMove® High-Precision Lever Amplified Z-Actuator with Flexure Guiding), P-611.1 · P-611.2, P-611.1 · P-611.2, P-611.1 · P-611.2, P-611.3S · P-611.3O, P-611.ZS · P-611.XZS, P-611.ZS · P-611.XZS, P-612.2, P-612.2, P-612.Z, P-615, P-620.1 – P-628.1, P-620.Z · P-621.Z · P-622.Z, P-713 · P-714, P-720, P-721, P-725, P-732.ZC, P-733.2DD · P-733.3DD, P-734, P-750, P-752, P-753 (LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology), P-770, P-772, P-772.0L, P-780, Z/Tilt Piezoelectric Flexure Stage P-287 |
| Related Products: |
Analog and Pulsed Drivers for PILine® Ultrasonic Piezo Linear Motors C-180 · C-181 · C-184 · C-185, C-180 · C-181 · C-184 · C-185 Analog and Pulsed Drivers for PILine® Ultrasonic Piezo Linear Motors, E-651 – E-614, High-Power, Modular HVPZT Piezo Amplifiers / Controllers E-470 – E-471 – E-472 – E-420, HVPZT amplifier module E-507, M-619 – M-626 Micrometer Drives with Rotating Tips, Modular Piezo Control Systems (HVPZT & LVPZT) E-500 – E-501, P-620.1 – P-628.1, P-620.Z · P-621.Z · P-622.Z, PICA™-Stack piezo actuators, wide variety, high-force capacity P-007 – P-056, PICMA® Multilayer piezo stacks P-882 – P-888, PILine® Low-Profile Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors M-665, PILine® Miniature High-Speed, Ultrasonic Piezo Linear Motor for OEMs P-661, PILine® Miniature High-Speed, Ultrasonic Piezo Linear Motor for OEMs P-661, PILine® Miniature High-Speed, Ultrasonic Piezo Linear Motor for OEMs P-661, PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors M-663, PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors M-663, PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motors M-661 · M-662, PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motors M-661 · M-662, S-310 – S-316 |
|
|
|
|
