|
Product Name: Z/Tilt Piezoelectric Flexure Stage P-287
Product Description
The P-287 is a high-resolution, piezoelectrically driven flexure stage providing tilt up to 12 mrad and vertical travel up to 700 µm at the tip. A ball seat is machined into the tip to decouple any rotation if the P-287 is used as a linear drive. In that case an external guiding system is recommended (e.g. frictionless diaphragm spring).
Working Principle
P-287 positioners are equipped with high-voltage piezoelectric drives (0 to -1000 V) integrated into a zero stiction/friction, ultra-high-resolution, wire-EDM-cut flexure motion amplifier system. The linear motion of the piezo translator produces an arc motion of the tip.
Application Examples
Wafer inspection
Nanopositioning
Medical analysis
Biology
Optics
Company Details
Where nanopositioning technology and motion control systems of the highest accuracy level are concerned, PI has been a leading supplier worldwide for many years.
Over 30 Years Experience
When PI introduced piezoelectric... more
| More Products of this Company: |
M-714, NEXLINE® High-Load Piezo Nanopositioning Drive N-214 · N-215, P-280, P-281 · P-282, P-287, P-290 (Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator), P-363, P-517 · P-527, P-518 · P-528 · P-558, P-541.2CD · P-542.2CD, P-541.ZSL, P-541.ZSL, P-561 · P-562 · P-563, P-587, P-601 (PiezoMove® High-Precision Lever Amplified Z-Actuator with Flexure Guiding), P-611.1 · P-611.2, P-611.1 · P-611.2, P-611.1 · P-611.2, P-611.3S · P-611.3O, P-611.ZS · P-611.XZS, P-611.ZS · P-611.XZS, P-612.2, P-612.2, P-612.Z, P-615, P-620.1 – P-628.1, P-620.2 – P-628.2, P-620.Z · P-621.Z · P-622.Z, P-713 · P-714, P-720, P-721, P-725, P-732.ZC, P-733.2DD · P-733.3DD, P-734, P-750, P-752, P-753 (LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology), P-770, P-772, P-772.0L, P-780 |
| Related Products: |
Analog and Pulsed Drivers for PILine® Ultrasonic Piezo Linear Motors C-180 · C-181 · C-184 · C-185, C-170 RedStone Open-Loop Controller/Driver for PILine® Ultrasonic Piezo Linear Motors, C-180 · C-181 · C-184 · C-185 Analog and Pulsed Drivers for PILine® Ultrasonic Piezo Linear Motors, C-843 Servo Motion Controller/Driver PCI Board for 2 / 4 Axes, C-865 High-Speed,Closed-Loop Controller/Driver for PILine® Ultrasonic Piezo Linear Motors, C-880 Automation Platform, C-880 Automation Platform, Display Modules for Modular Piezo Controllers E-515, E-481, E-610 (LVPZT piezo amplifier / servo-controller module, OEM), E-621, E-625, E-650, E-651 – E-614, E-660, E-663, E-664, E-665, E-710, E-750, E-755, E-760, E-761, E-831 · E-841 · E-842, F-110 XYZ Hybrid Manual/Piezoelectric Photonics Alignment System |
|
|
|
|
