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ST with development of micro multi axial MEMS gyroscopes the Italian corporation and cooperation (ST micro)
:: 17 May, 2007
ST microelectronics of the Italy French joint venture announced that [saesu] [getsutazu] of Italy (SAES Getters) it concluded joint venture contract with the groups, on the 17th, MEMS of the next generation (Micro Electro-Mechanical Systems) in regard to the development and production of the gyroscope. By the fact that it cooperates with the same group which has the high result the getter in the high degree of vacuum (exhaust) in regard to technology, you aim toward the development of the gyroscope product whose stability is high with high sensitivity.
MEMS is process technology of the minute electrical machinery element. As for the MEMS gyroscope, with the accelerating sensor which freely used this, demand in wide field such as car Nabi and portable telephone and game machine is anticipated.
ST the plan which starts the mass production of the gyroscope in the micro with, 2008 first half. Both corporations assure competitiveness strengthening in the same field where in the future enlargement of the market is expected by the latest contract.
News Inside News :
The SAES® Getters group of worldwide top class (below SAES) with, MEMS (Micro Electro-Mechanical Systems) at the time of production selling of the device in regard to the getter technology with high degree of vacuum application ST microelectronics of worldwide top class (http://www.st-japan.co.jp/ and NYSE: STM and below ST), it concluded the joint venture contract which supports the development and production of the next generation MEMS gyroscope. With the wafer level packaging of MEMS sensitivity of the device and improvement of stability are actualized by applying PaGeWafer® of SAES which is the most advanced getter thin film solution at the time of high degree of vacuum maintaining to the gyroscope of ST.
MEMS based IC has caused large reform at semiconductor industry the unique electric quality which silicon has by utilizing the both of the mechanical quality which is superior. Electric quality of silicon became the basis of semiconductor business past over 40~50 year, but those where it reaches the point where mechanical quality of silicon is utilized are relatively recent thing, the MEMS gyroscope is the up-to-date territory even among them. The gyroscope where these are new (the device which measures angular velocity), as the product group of 2 axes and 3 axial MEMS accelerometer of ST is compensated, the perfect inertial sensor platform is offered to the user. New function is made possible with the MEMS gyroscope of ST which small size, high sensitivity, and electric power consumption unites low and is brought together, the portable telephone and the portable device, the MP3/MP4 player, PDA, in wide [konsuma] application such as game machine and navigation device. With ST, it is the schedule which starts the mass production of the gyroscope in 2008 first half.
The gyroscope market grows quickly in plural application fields. In addition to the electronic type stability system and the GPS receiver of the automobile, when motion user interface and video & of the portable communication device/the digital camera the image stabilizer the MEMS gyroscope stands up even in the [konsuma] field to which include the camera, the industry analyst has predicted. It is estimated that with expectation of the analyst, as for market scale of the MEMS gyroscope, from 400,000,000 dollar 2006 in 2012 it grows to 1,200,000,000 dollar, or more in 5 years reaches 3 times.
2006 November, ST was completed the [agurate] factory (the Italian & Milan suburb) the leading edge 200mm whose MEMS device exclusive use is new (8 inches) the semiconductor wafer production line. As for the 1st generation gyroscope of ST, presently pilot production and quality evaluation are done, as the linear accelerating sensor means to be produced on the same line.
SAES, recently [rinate] (Italy, the Milan suburb) upgraded the production line of PaGeWafer which is the head office, corresponded to also 8 inches format already available in addition to the processing of 4, 5, and 6 inches format. The processing line of 8 inches format of SAES at for one for industry has entered into complete mass production work system at point in time of 2006 end of year, already it has been used for 8 inches wafer of ST.
As for PaGeWafer, the degree of vacuum inside the MEMS device which the wafer and the wafer the sealing up bonding is done or it is something which is designed in order to guarantee the long-term stability of the inert gas, by the SAES Getters group. It consists of several micron thick getter films which have pattern, follows to the important matter of the user and it is arranged on the cavity of the specification which form and depth is defined. All active gases such as H2O, O2, CO, CO2, N2, and H2 the maximum it absorbs PaGeWafer by operating as a cap wafer of the MEMS package, makes the reliability and life increase of the device. The merit of the thing which applies getter film technology to the large-sized baseplate like 8 inches wafer format, is uniform improvement of pressure distribution and substantial shortening in process time. In addition to the offer of PaGeWafer technology, SAES technical consulting, and does the support for ST the out gas/the remaining behind gas analysis service offer which reach to the airtight package design/quality appraisal and degree of vacuum important matter definition even in the aspect.
Marco Moraja it is the getter business development manager for MEMS of SAES has commented as follows. “This corporation seems like ST, you are glad the principal manufacturer in the MEMS market and that partnership is constructed very. At this corporation, you think development of the market of the MEMS motion sensor of [konsuma] electronics field, as one of the most important goals. That PaGeWafer technology is integrated in the advanced MEMS gyro scope of ST it includes the automobile industry whose request is harsh, has shown the usefulness where the getter film product to the MEMS application to which already we correspond is high.”
Has commented Benedetto Vigna which is the MEMS product section general manager of ST as follows. “ST is a history of long success in the partnership of the industry leader like the SAES Getters group. As for the user it is guaranteed the technicality in the getter film technology of SAES by integrating to the MEMS technology which leads/reads the industry of ST, as for ST that the MEMS gyroscope of the highest quality can be procured, furthermore can expand the MEMS business which is in the midst of rapid growth.”
About the SAES Getters group
[saesu] [getsutazugurupu] has served the leader of the world various scientific industrial application fields where the super high purity gas is required as a pioneer of getter technology, in the extreme high vacuum and. The getter solution of this group, the information display device and lamp industry, in minimizing, and the extreme high vacuum system of the silicon based micro mechanical device and the numerous field which reaches to evacuated insulation technology, supported the technological innovation from the large-sized vacuum power tube past over 60 years. In addition, this group the semiconductor in addition for high-tech industry is the leader of super high purity gas handling technology. Strengthening the core technology of special metallurgy and material science more, it has expanded business to field of new optical crystal and form memory alloy product line from 2004. This group had the gross production ability of 10 factories which extend over 3 continents, and the sale service network on of a worldwide scale became multi cultural abilities of the 900 names close employee and the true global enterprise which connects knowledge. [saesu] [getsutazugurupu], [rinate] of the Italian Milan suburb (Linate) we put in place the group head office, from 1986 present to the Italian stock exchange STAR segment.
Please view www.saesgetters.com concerning details.
About ST microelectronics
ST microelectronics is the worldwide comprehensive semiconductor manufacturer which it develops & offers the semiconductor product and the solution in for the various electronic equipment. ST has possessed high-level silicon technology and the system know-how which do not permit following of other companies, position as a worldwide leader wide IP (Intellectual Property) the portfolio and strategic partnership, with the combination with the large-scale production power, SoC (the system - on - the tip/chip) in regard to technology has been established. In addition as for the semiconductor product of ST, important function is carried out in order to promote the [konbajiensu] conversion of technology and the system in the market. As for ST, the New York stock exchange (NYSE: STM) The Paris Bourse (Euronext Paris) with it is presented to the Milan stock exchange. As for sale 2006 for 98.5 hundred million dollars, as for Sumitosi benefit it was 782,000,000 dollar.
Furthermore as for detailed information, please read the home page of ST.
ST Japanese corporate body http://www.st-japan.co.jp/
ST group (English) http://www.st.com/stonline/
The SAES Getters group - you anticipate, about information
The estimated information which in the future at present time is based on estimate, the estimated information which in addition has risk and uncertainty is included by this news release, various risks and the uncertainty such as that the statement in the future regarding estimate and can become the result of this corporation and the primary factor where the achievement differs greatly. As for these primary factors, the new product schedule price and the ability to sell to schedule date and the ability to maintain the relationship with the principal customer and the economic environment in each country where this corporation does business is included. In addition, those primary factors include all primary factors not just earlier description. This corporation with the occurrence of occurrence and circumstance, or unexpected situation after this date, these anticipates does not owe the obligation which is the possibility of happening to information, publishes all revision results.
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Marina Perino
SAES Getters Group and Group Marcom Manager
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